SURFiEW Compact
High-performance 3D optical metrology in a compact platform
The SURFiEW 1000C Compact is designed for laboratories and quality-control environments that need precise, non-contact 3D surface measurement without the footprint or complexity of a fully automated system.
Using visible-light interferometry, it delivers nanometer-scale vertical resolution while offering the flexibility of a manual 5-position objective turret.
Precise. Flexible. Easy to integrate into your laboratory.
One platform.
Multiple magnifications.
The Compact features a manual 5-position objective turret, allowing several optical configurations to be installed on the same system.
Available objective magnifications:
2.5× · 5× · 10× · 20× · 50× · 100×
A selectable zoom lens further adapts the optical configuration:
0.55× · 0.75× · 1× · 1.5× · 2×
One zoom lens is mounted as standard, with an optional two-position manual zoom configuration.
This provides the flexibility to adapt the measurement field and lateral sampling to different sample sizes and surface features.
Faster scanning for everyday measurements
The Compact uses a closed-loop piezo scanning system integrated into the lens turret.
Standard scan range
Up to 200 µm
Standard scan velocity
16 µm/s
Optional scan velocity
Up to 32 µm/s
This makes the SURFiEW Compact particularly well suited to routine laboratory measurements where measurement speed and repeatability both matter.
Automatic illumination
The SURFiEW Compact integrates both:
White LED illumination
Green LED illumination
Illumination selection is automatic, helping users quickly obtain suitable measurement conditions for different surfaces.
Measurement Performance
ParameterSURFiEW 1000C Compact
Measuring principleVSI / VEI / VPI
Vertical resolution VSI / VEI< 0.5 nm
Vertical resolution VPI< 0.1 nm
Height repeatability≤ 0.1%
Height accuracy≤ 0.5%
Width repeatability≤ 0.1%
Width accuracy≤ 0.5%
Scan range≤ 200 µm
Scan velocity16 µm/s
Optional scan velocity32 µm/s
XY travel50 × 50 mm
Z travel30 mm
Work table100 × 100 mm
Maximum load 5 kg
Need to know which optical configuration is right for your sample?
Send us a sample.
We can perform a measurement and provide a measurement report to help identify the most suitable interferometric head and optical configuration for your application.
